Ifilimu elincanyana i-lithium niobate impahla nefilimu encane ye-lithium niobate modulator

Izinzuzo nokubaluleka kwefilimu elincanyana i-lithium niobate kubuchwepheshe obuhlanganisiwe be-microwave photon

Ubuchwepheshe be-Microwave Photoninezinzuzo zomkhawulokudonsa omkhulu wokusebenza, ikhono eliqinile lokucutshungulwa okuhambisanayo kanye nokulahlekelwa okuncane kokudlulisela, okunamandla okunqamula ibhodlela lobuchwepheshe lohlelo lwe-microwave lwendabuko futhi kuthuthukiswe ukusebenza kwemishini yezempi yolwazi lwe-elekthronikhi efana ne-radar, impi kagesi, ukuxhumana nokulinganisa kanye ukulawula.Kodwa-ke, isistimu ye-microwave photon esekelwe kumadivayisi ahlukene inezinkinga ezithile ezifana nevolumu enkulu, isisindo esisindayo kanye nokungaqini kahle, okukhawulela kakhulu ukusetshenziswa kobuchwepheshe be-microwave photon kumapulatifomu asemkhathini nasemoyeni.Ngakho-ke, ubuchwepheshe obuhlanganisiwe be-microwave photon buya kuba usekelo olubalulekile lokunqamula ukusetshenziswa kwe-microwave photon ohlelweni lwezolwazi lwe-elekthronikhi lwezempi futhi lunikeze ukudlala ngokugcwele izinzuzo zobuchwepheshe be-microwave photon.

Njengamanje, ubuchwepheshe bokuhlanganiswa kwezithombe ezisekelwe ku-SI kanye nobuchwepheshe bokuhlanganiswa kwezithombe ezisekelwe ku-INP sebukhule ngokwengeziwe ngemva kweminyaka eminingi yentuthuko emkhakheni wezokuxhumana obonakalayo, futhi miningi imikhiqizo efakwe emakethe.Kodwa-ke, ekusetshenzisweni kwe-microwave photon, kunezinkinga ezithile kulezi zinhlobo ezimbili zobuchwepheshe bokuhlanganiswa kwe-photon: isibonelo, i-nonlinear electro-optical coefficient ye-Si modulator ne-InP modulator iphambene nomugqa ophezulu kanye nezici ezinkulu ezinamandla ezilandelwa i-microwave. ubuchwepheshe be-photon;Isibonelo, i-silicon optical switch eqaphela ukushintsha kwendlela yokubona, kungakhathaliseki ukuthi isekelwe kumphumela we-thermal-optical, umphumela we-piezoelectric, noma umphumela wokuhlakazeka komjovo wenkampani yenethiwekhi, inezinkinga zesivinini sokushintsha kancane, ukusetshenziswa kwamandla kanye nokusetshenziswa kokushisa, okungakwazi ukuhlangabezana nokushesha. ukuskena kwe-beam kanye nezicelo ezinkulu zesikali se-microwave photon.

I-Lithium niobate ibilokhu iyisinqumo sokuqala sejubane eliphezuluukuguqulwa kwe-electro-opticizinto zokwakha ngenxa yomphumela wayo omuhle kakhulu we-electro-optic.Nokho, bendabuko lithium niobatei-electro-optical moduleyenziwe ngezinto ezinkulu ze-lithium niobate crystal, futhi usayizi wedivayisi mkhulu kakhulu, ongakwazi ukuhlangabezana nezidingo zobuchwepheshe obuhlanganisiwe be-microwave photon.Indlela yokuhlanganisa izinto ze-lithium niobate nge-coefficient ye-electro-optical eqondile ohlelweni oludidiyelwe lwe-microwave photon sekuyinhloso yabacwaningi abafanelekile.Ngo-2018, ithimba labacwaningi abavela eNyuvesi yase-Harvard e-United States labika okokuqala ngobuchwepheshe bokuhlanganiswa kwe-photonic obusekelwe kwifilimu encane ye-lithium niobate e-Nature, ngoba ubuchwepheshe bunobuhle bokuhlanganisa okuphezulu, umkhawulokudonsa omkhulu we-electro-optical modulation, kanye nomugqa ophezulu we-electro. -umphumela we-optical, lapho usuqalisiwe, wabangela ngokushesha ukunakwa kwezemfundo nezimboni emkhakheni wokuhlanganiswa kwezithombe kanye nezithombe ze-microwave.Ngokombono wesicelo se-microwave photon, leli phepha libuyekeza umthelela nokubaluleka kobuchwepheshe bokuhlanganiswa kwe-photon okusekelwe kufilimu elincanyana i-lithium niobate ekuthuthukisweni kobuchwepheshe be-microwave photon.

Ifilimu elincanyana i-lithium niobate impahla nefilimu elincanyanai-lithium niobate modulator
Eminyakeni emibili yamuva nje, kuye kwavela uhlobo olusha lwezinto ezibonakalayo ze-lithium niobate, okungukuthi, ifilimu ye-lithium niobate ikhishwa ekristaluni elikhulu le-lithium niobate ngendlela "yokusikela i-ion" futhi iboshelwe ku-Si wafer nge-silica buffer layer ifomu LNOI (LiNbO3-On-Insulator) impahla [5], ebizwa ngokuthi ifilimu elincanyana le-lithium niobate impahla kuleli phepha.Ama-waveguide ama-Ridge anobude obungaphezu kwama-nanometer ayi-100 angabhalwa kuzinto ezisetshenziswayo ze-lithium niobate zefilimu elincanyana ngenqubo yokuqopha okomile, kanye nomehluko wenkomba osebenzayo we-refractive wamagagasi okwakhiwa ungafinyelela ngaphezu kuka-0.8 (uphakeme kakhulu kunomehluko wenkomba ye-refractive yendabuko. i-lithium niobate waveguides ka-0.02), njengoba kuboniswe kuMfanekiso 1. I-waveguide ekhawulelwe ngokuqinile yenza kube lula ukufanisa inkambu yokukhanya nenkundla ye-microwave uma uklama imoduli.Ngakho-ke, kuyazuzisa ukufeza i-voltage ephansi yesigamu-wave kanye nomkhawulokudonsa omkhulu wokumodulisa ngobude obufushane.

Ukubonakala kokulahlekelwa okuphansi kwe-lithium niobate submicron waveguide kwephula ibhodlela lamandla kagesi okushayela we-lithium niobate electro-optic modulator evamile.Isikhala se-electrode singancishiswa sibe ~ 5 μm, futhi ukugqagqana phakathi kwenkundla kagesi kanye nenkambu yemodi ye-optical kwanda kakhulu, futhi i-vπ · L iyancipha isuka ngaphezu kuka-20 V · cm ibe ngaphansi kuka-2.8 V · cm.Ngakho-ke, ngaphansi kwe-voltage efanayo ye-half-wave, ubude bedivayisi bungancishiswa kakhulu uma buqhathaniswa ne-modulator evamile.Ngesikhathi esifanayo, ngemva kokuthuthukisa imingcele yobubanzi, ukujiya kanye nesikhawu se-electrode yamagagasi ahambayo, njengoba kukhonjisiwe emfanekisweni, imoduli ingaba nekhono lomkhawulokudonsa ophakeme wokumodulation omkhulu kuno-100 GHz.

Fig.1 (a) ukusabalalisa kwemodi ebaliwe kanye (b) nesithombe sesigaba esiphambene se-LN waveguide

I-Fig.2 (a) I-Waveguide kanye nesakhiwo se-electrode kanye (b) ne-coreplate ye-modulator ye-LN

 

Ukuqhathaniswa kwama-modulators wefilimu elincanyana i-lithium niobate nama-modulators wendabuko we-lithium niobate, ama-modulators asuselwa ku-silicon kanye nama-indium phosphide (InP) kanye namanye ama-modulators anesivinini esiphezulu se-electro-optical, imingcele eyinhloko yokuqhathanisa ihlanganisa:
(1) Umkhiqizo we-volt-ubude obuyingxenye yegagasi (vπ ·L, V·cm), ukala ukusebenza kahle kokuguquguquka kwesiguquli, uma sisincane inani, kulapho izinga lokuguquguquka liphezulu lisebenza kahle;
(2) 3 dB umkhawulokudonsa we-modulation (GHz), okala impendulo yesiguquli ekuguquleni imvamisa ephezulu;
(3) Ukulahleka kokufakwa kwe-Optical (dB) endaweni yokushintshashintsha.Kungabonakala etafuleni ukuthi ifilimu encane ye-lithium niobate modulator inezinzuzo ezisobala kumkhawulokudonsa we-modulation, i-half-wave voltage, ukulahlekelwa kwe-optical interpolation nokunye.

I-silicon, njengetshe legumbi le-optoelectronics ehlanganisiwe, iye yathuthukiswa kuze kube manje, inqubo isivuthiwe, i-miniaturization yayo ihambisana nokuhlanganiswa okukhulu kwamadivaysi asebenzayo / angenayo, futhi i-modulator yayo iye yafundwa kabanzi futhi yajula emkhakheni we-optical. ukuxhumana.I-electro-optical modulation mechanism ye-silicon ikakhulukazi i-depling-tion yenkampani yenethiwekhi, umjovo othwalayo kanye nokunqwabelana komthwali.Phakathi kwazo, i-bandwidth ye-modulator ilungile nge-linear degree carrier depletion mechanism, kodwa ngenxa yokuthi ukusabalalisa kwenkundla ye-optical kudlulela nokungafani kwesifunda sokunciphisa, lo mphumela uzokwethula ukuhlanekezela kwe-oda lesibili okungahambisani nokuhlanekezelwa kwe-oda lesithathu. imigomo, ehambisana nomthelela wokumunca womthwali ekukhanyeni, okuzoholela ekwehlisweni kwe-optical modulation amplitude kanye nokuhlanekezela kwesignali.

I-InP modulator inemiphumela evelele ye-electro-optical, futhi isakhiwo somthombo we-quantum enezendlalelo eziningi singakwazi ukubona izinga eliphezulu kakhulu kanye namamojula kagesi okushayela aphansi nge-Vπ·L kufika ku-0.156V · mm.Kodwa-ke, ukuhluka kwenkomba ye-refractive enensimu kagesi ihlanganisa imigomo eqondile nengaqondile, futhi ukwanda kwamandla kagesi kuzokwenza umphumela we-oda wesibili uvelele.Ngakho-ke, ama-silicon kanye ne-InP electro-optic modulators kudingeka asebenzise ukuchema ukuze enze i-pn junction lapho esebenza, futhi i-pn junction izoletha ukulahleka kokumuncwa ekukhanyeni.Nokho, usayizi wemoduli walokhu okubili mncane, usayizi wemoduli ye-InP yezentengiso ungu-1/4 wemoduli ye-LN.Ukusebenza kahle kokushintshashintsha kwe-modulation, kulungele ukuminyana okuphezulu kanye namanethiwekhi okudlulisa amehlo edijithali amabanga amafushane njengezikhungo zedatha.Umphumela we-electro-optical we-lithium niobate awunayo indlela yokumunca ukukhanya nokulahlekelwa okuphansi, ofanele ukuhambisana kwebanga elide.ukuxhumana opticalngomthamo omkhulu kanye nezinga eliphezulu.Kuhlelo lokusebenza lwe-microwave photon, ama-coefficients we-electro-optical we-Si ne-InP awawona mugqa, angafaneleki kusistimu ye-microwave photon elandela ukulandelana okuphezulu namandla amakhulu.I-lithium niobate impahla ifaneleka kakhulu ekusetshenzisweni kwe-microwave photon ngenxa yomugqa wayo wokulinganisa we-electro-optic modulation coefficient.


Isikhathi sokuthumela: Apr-22-2024