Enye yezinto ezibaluleke kakhulu zemoduli ye-optical isivinini sayo sokushintshashintsha noma umkhawulokudonsa, okufanele okungenani usheshe njengezinto zikagesi ezitholakalayo.Ama-Transistors anamaza okuthutha angaphezu kuka-100 GHz asebonisiwe kakade kubuchwepheshe be-silicon ye-90 nm, futhi isivinini sizokhula njengoba usayizi wesici esincane uncipha [1].Kodwa-ke, umkhawulokudonsa wama-modulators asekelwe ku-silicon yanamuhla unomkhawulo.I-Silicon ayinayo i-χ(2)-nonlinearity ngenxa yesakhiwo sayo sekristalu eyi-centro-symmetric.Ukusetshenziswa kwe-silicon ehlutshiwe kuholele emiphumeleni ethokozisayo kakade [2], kodwa okungezona umugqa akukawavumeli amadivaysi asebenzayo.Ngakho-ke, ama-modulators e-silicon photonic asezingeni eliphezulu asathembele ekuhlakazweni kwe-free-carrier kuma-pn noma amaphinikhodi [3-5].Ukuhlangana okuchemile okuya phambili kukhonjisiwe ukubonisa umkhiqizo onobude bevoltheji ophansi njenge-VπL = 0.36 V mm, kodwa isivinini sokushintshwa sinqunyelwe amandla ezinkampani zenethiwekhi ezincane.Noma kunjalo, amanani wedatha we-10 Gbit/s akhiwe ngosizo lokugcizelelwa kwangaphambili kwesignali kagesi [4].Kusetshenziswa ukuhlangana okuchemile okuhlanekezelwe esikhundleni salokho, umkhawulokudonsa unyusiwe wafinyelela cishe ku-30 GHz [5,6], kodwa ubude be-voltage umkhiqizo ukhuphukele ku-VπL = 40 V mm.Ngeshwa, ama-modulators wesigaba somphumela we-plasma akhiqiza ukuguquguquka kokuqina okungafuneki kanye [7], futhi aphendula ngokungaqondile ku-voltage esetshenzisiwe.Amafomethi wokuguquguquka athuthukile njenge-QAM adinga, nokho, impendulo yomugqa kanye nokushintshashintsha kwesigaba okumsulwa, okwenza ukuxhashazwa komphumela we-electro-optic (umphumela we-Pockels [8]) ufiseleke kakhulu.
2. Indlela ye-SOH
Muva nje, indlela ye-silicon-organic hybrid (SOH) iye yaphakanyiswa [9-12].Isibonelo se-modulator ye-SOH sikhonjiswe ku-Fig. 1 (a).Iqukethe i-slot waveguide eqondisa inkambu yokubona, kanye nemicu emibili ye-silicon exhuma ngogesi i-optical waveguide kuma-electrode ensimbi.Ama-electrode atholakala ngaphandle kwenkambu ye-optical modal ukuze agweme ukulahlekelwa kwe-optical [13], Fig. 1 (b).Idivayisi imbozwe nge-electro-optic organic material egcwalisa ngokulinganayo indawo.I-voltage eguqukayo ithwalwa yi-metallic electrical waveguide futhi yehla kuyo yonke indawo ngenxa yemicu ye-silicon ehambisayo.Inkambu kagesi ewumphumela ibe isishintsha inkomba ye-refraction ku-slot ngokusebenzisa umphumela we-electro-optic osheshayo.Njengoba i-slot inobubanzi ngokulandelana kwe-nm eyi-100, ama-volts ambalwa anele ukukhiqiza izinkambu zokumodela eziqine kakhulu ezilandelana kobukhulu bamandla e-dielectric wezinto eziningi.Isakhiwo sinokusebenza kahle kokushintshashintsha kwe-modulation kusukela kokubili i-modulating kanye nezinkambu ze-optical zigxilwe ngaphakathi kwe-slot, i-Fig. 1 (b) [14].Ngempela, ukuqaliswa kokuqala kwe-SOH modulators nge-sub-volt operation [11] sekuvele kubonisiwe, futhi ukuguqulwa kwe-sinusoidal kuze kufike ku-40 GHz kubonisiwe [15,16].Kodwa-ke, inselele ekwakheni amamojula we-SOH anesivinini esiphezulu se-voltage ephansi ukwakha umucu wokuxhuma osebenza kakhulu.Kumjikelezo olinganayo i-slot ingamelwa yi-capacitor C kanye nemichilo ye-conductive ngama-resistors R, Fig. 1 (b).Isikhathi esihambisanayo se-RC njalo sinquma umkhawulokudonsa wedivayisi [10,14,17,18].Ukuze kuncishiswe ukumelana no-R, kuphakanyiswe ukuthi kufakwe imichilo ye-silicon [10,14].Ngenkathi i-doping ikhulisa ukuqhutshwa kwemigqa ye-silicon (futhi ngakho-ke ikhulisa ukulahlekelwa kwe-optical), umuntu ukhokha inhlawulo yokulahlekelwa eyengeziwe ngoba ukuhamba kwe-electron kuphazamiseka ukuhlakazeka kokungcola [10,14,19].Ngaphezu kwalokho, imizamo yokwenziwa yakamuva yabonisa ukusebenza okuphansi okungalindelekile.
I-Beijing Rofea Optoelectronics Co., Ltd. etholakala “eSilicon Valley” yaseChina – Beijing Zhongguancun, iyibhizinisi lobuchwepheshe obuphezulu elizinikele ekuhlinzekeni izikhungo zocwaningo zasekhaya nezangaphandle, izikhungo zocwaningo, amanyuvesi kanye nabasebenzi bocwaningo lwesayensi ebhizinisi.Inkampani yethu ibambe iqhaza kakhulu ocwaningweni nasekuthuthukisweni okuzimele, ukuklama, ukukhiqiza, ukuthengiswa kwemikhiqizo ye-optoelectronic, futhi ihlinzeka ngezixazululo ezintsha nezinsizakalo eziqeqeshiwe, ezenzelwe wena uqobo abacwaningi besayensi nonjiniyela bezimboni.Ngemuva kweminyaka eminingi yokusungula izinto ezizimele, iye yakha uchungechunge olucebile noluphelele lwemikhiqizo ye-photoelectric, esetshenziswa kakhulu kumasipala, ezempi, ezokuthutha, amandla kagesi, ezezimali, ezemfundo, ezokwelapha nezinye izimboni.
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Isikhathi sokuthumela: Mar-29-2023