Uhlelo lwezinto zesekethe ehlanganisiwe ye-Photonic (PIC)

Uhlelo lwezinto zesekethe ehlanganisiwe ye-Photonic (PIC)

I-Silicon photonics iwumkhakha osebenzisa izakhiwo ezihleliwe ezisekelwe ezintweni ze-silicon ukuqondisa ukukhanya ukuze kufezwe imisebenzi eyahlukahlukene. Sigxila lapha ekusetshenzisweni kwe-silicon photonics ekudaleni ama-transmitter nama-receiver okuxhumana kwe-fiber optic. Njengoba isidingo sokwengeza ukudluliselwa okwengeziwe ku-bandwidth ethile, indawo ethile, kanye nezindleko ezithile zikhuphuka, i-silicon photonics iba ngcono ngokwezomnotho. Engxenyeni ye-optical,ubuchwepheshe bokuhlanganisa izithombekumele kusetshenziswe, futhi ama-transceiver amaningi ahambisanayo namuhla akhiwe kusetshenziswa ama-modulators ahlukene e-LiNbO3/ planar light-wave circuit (PLC) kanye nama-receiver e-InP/PLC.

Umfanekiso 1: Ibonisa izinhlelo zezinto ezisetshenziswa kakhulu zesekethe ehlanganisiwe ye-photonic (PIC).

Isithombe 1 sibonisa izinhlelo zezinto ze-PIC ezithandwa kakhulu. Kusukela kwesobunxele kuya kwesokudla kukhona i-silicon-based silica PIC (eyaziwa nangokuthi i-PLC), i-silicon-based insulator PIC (i-silicon photonics), i-lithium niobate (LiNbO3), kanye ne-III-V group PIC, njenge-InP kanye ne-GaAs. Leli phepha ligxile kuma-photonics asekelwe ku-silicon.ama-photonic e-silicon, isignali yokukhanya ihamba kakhulu ku-silicon, enegebe elingaqondile lama-electron volts angu-1.12 (enobude obungu-1.1 microns). I-Silicon ikhuliswa ngesimo samakristalu ahlanzekile ezithandweni bese inqunywa ibe ama-wafer, namuhla avame ukuba ngu-300 mm ububanzi. Ubuso be-wafer buyashiswa ukuze kwakhiwe ungqimba lwe-silica. Elinye lama-wafer ligcwele ama-athomu e-hydrogen kuze kube sekujuleni okuthile. Ama-wafer amabili abe esehlanganiswa ku-vacuum bese izingqimba zawo ze-oxide zihlangana. Ukuhlangana kuyaqhekeka emgqeni wokufakelwa kwe-hydrogen ion. Ungqimba lwe-silicon endaweni yokuqhekeka luyapholishwa, ekugcineni kushiye ungqimba oluncane lwe-crystalline Si phezu kwe-wafer "yesibambo" se-silicon engaguquki phezu kongqimba lwe-silica. Ama-waveguides akhiwa kusukela kule ngqimba encane ye-crystalline. Ngenkathi la ma-wafer asekelwe ku-silicon-based insulator (SOI) enza kube nokwenzeka ama-waveguides e-silicon photonics aphansi, empeleni asetshenziswa kakhulu kumasekethe e-CMOS anamandla aphansi ngenxa yamandla okuvuza aphansi ahlinzeka ngawo.

Kunezinhlobo eziningi ezingaba khona zama-waveguides e-optical asekelwe ku-silicon, njengoba kuboniswe ku-Figure 2. Asukela kuma-waveguides e-silica afakwe i-microscale germanium kuya kuma-waveguides e-Silicon Wire angenawo ama-nanoscale. Ngokuhlanganisa i-germanium, kungenzeka ukwenzaama-photodetectorskanye nokumuncwa kukagesiama-modulators, futhi mhlawumbe ngisho nama-amplifier optical. Ngokusebenzisa i-doping silicon, i-amplifiersi-modulator yokukhanyakungenziwa. Izansi kusukela kwesobunxele kuya kwesokudla yilezi: i-silicon wire waveguide, i-silicon nitride waveguide, i-silicon oxynitride waveguide, i-thick silicon ridge waveguide, i-thin silicon nitride waveguide kanye ne-doped silicon waveguide. Phezulu, kusukela kwesobunxele kuya kwesokudla, kukhona ama-depletion modulators, ama-germanium photodetectors, kanye ne-germaniumama-amplifier optical.

Umfanekiso 2: Ingxenye enqamula uchungechunge lwe-optical waveguide olusekelwe ku-silicon, olubonisa ukulahlekelwa okujwayelekile kokusabalala kanye nezinkomba zokukhanya.