I-wafer esebenza kahle kakhulu ye-ultrafastubuchwepheshe be-laser
Amandla aphezuluama-laser asheshayo kakhuluzisetshenziswa kabanzi ekukhiqizeni okuthuthukile, ulwazi, ubuchwepheshe be-microelectronics, i-biomedicine, ukuvikela kuzwelonke kanye nemikhakha yezempi, futhi ucwaningo lwesayensi olufanele lubalulekile ekukhuthazeni ukusungulwa kwesayensi nobuchwepheshe kuzwelonke kanye nentuthuko esezingeni eliphezulu.uhlelo lwe-laserNgezinzuzo zayo zamandla aphezulu ajwayelekile, amandla amakhulu okushaya kwenhliziyo kanye nekhwalithi enhle kakhulu yemisebe, inesidingo esikhulu ku-attosecond physics, ukucubungula izinto kanye neminye imikhakha yesayensi neyezimboni, futhi ibilokhu ikhathazekile kabanzi ngamazwe emhlabeni wonke.
Muva nje, ithimba locwaningo eShayina lisebenzise i-wafer module ezithuthukisele yona kanye nobuchwepheshe bokukhulisa kabusha ukuze kufezwe ukusebenza okuphezulu (ukuzinza okuphezulu, amandla aphezulu, ikhwalithi ephezulu ye-beam, ukusebenza kahle okuphezulu) i-wafer esheshayo kakhului-laserokukhiphayo. Ngokuklanywa kwe-cavity ye-regeneration amplifier kanye nokulawulwa kokushisa kobuso kanye nokuzinza komshini kwe-disc crystal emgodini, okukhiphayo kwe-laser kwamandla e-single pulse >300 μJ, ububanzi be-pulse <7 ps, amandla ajwayelekile >150 W kufinyelelwa, futhi ukusebenza kahle kokuguqulwa kokukhanya kuya ekukhanyeni okuphezulu kakhulu kungafinyelela ku-61%, okuphinde kube ukusebenza kahle kokuguqulwa kokukhanya okuphezulu okubikiwe kuze kube manje. I-M2<1.06@150W, ukuzinza kwamahora angu-8 RMS<0.33%, le mpumelelo iphawula inqubekela phambili ebalulekile ku-laser ye-ultrafast wafer esebenza kahle kakhulu, ezohlinzeka ngamathuba amaningi okusetshenziswa kwe-laser enamandla aphezulu.

Imvamisa yokuphindaphinda ephezulu, uhlelo lokukhulisa ukuvuselelwa kwe-wafer olunamandla aphezulu
Isakhiwo se-wafer laser amplifier siboniswe kuMfanekiso 1. Sihlanganisa umthombo wembewu yefayibha, ikhanda le-laser eliyisilayidi esincane kanye nomgodi we-regenerative amplifier. I-oscillator yefayibha efakwe i-ytterbium enamandla aphakathi angu-15 mW, ubude be-wavelength obuphakathi obungu-1030 nm, ububanzi be-pulse obungu-7.1 ps kanye nesilinganiso sokuphindaphinda esingu-30 MHz kwasetshenziswa njengomthombo wembewu. Ikhanda le-wafer laser lisebenzisa ikristalu ye-Yb: YAG eyenziwe ekhaya enobubanzi obungu-8.8 mm kanye nobukhulu obungu-150 µm kanye nohlelo lokupompa oluyi-48-stroke. Umthombo wephampu usebenzisa i-zero-phonon line LD enobude be-wavelength obungu-969 nm, okunciphisa i-quantum defect ibe ngu-5.8%. Isakhiwo esiyingqayizivele sokupholisa singapholisa ngempumelelo ikristalu ye-wafer futhi siqinisekise ukuzinza komgodi wokuvuselela. Umgodi wokuvuselela oqukethe amaseli e-Pockels (PC), ama-Thin Film Polarizers (TFP), ama-Quarter-Wave Plates (QWP) kanye ne-resonator ezinzile kakhulu. Ama-isolator asetshenziselwa ukuvimbela ukukhanya okukhulisiwe ukuthi kungalimazi umthombo wembewu. Isakhiwo se-isolator esakhiwe yi-TFP1, i-Rotator kanye ne-Half-Wave Plates (HWP) sisetshenziselwa ukuhlukanisa imbewu yokufaka kanye nama-pulse akhulisiwe. I-pulse yembewu ingena ekamelweni lokukhulisa kabusha nge-TFP2. Amakristalu e-Barium metaborate (BBO), i-PC, kanye ne-QWP ahlangana ukuze akhe i-optical switch esebenzisa i-voltage ephezulu ngezikhathi ezithile ku-PC ukuze ibambe i-pulse yembewu ngokukhetha bese iyisakaza emuva naphambili emgodini. I-pulse oyifunayo iyaguquguquka emgodini futhi ikhuliswa ngempumelelo ngesikhathi sokusabalala kohambo olujikelezayo ngokulungisa kahle isikhathi sokucindezela sebhokisi.
I-amplifier yokuvuselela i-wafer ikhombisa ukusebenza okuhle kokukhipha futhi izodlala indima ebalulekile emikhakheni yokukhiqiza ephezulu njenge-ultraviolet lithography eyingozi kakhulu, umthombo wephampu ye-attosecond, i-electronics ye-3C, kanye nezimoto zamandla amasha. Ngesikhathi esifanayo, ubuchwepheshe be-wafer laser kulindeleke ukuthi busetshenziswe ezinjinini ezinkulu ezinamandla amakhulu.amadivayisi e-laser, enikeza indlela entsha yokuhlola yokwakheka kanye nokutholakala kahle kwezinto esikalini sesikhala se-nanoscale kanye nesilinganiso sesikhathi se-femtosecond. Ngomgomo wokukhonza izidingo ezinkulu zezwe, ithimba lephrojekthi lizoqhubeka nokugxila ekusungulweni kobuchwepheshe be-laser, liqhubeke nokulungiselela amakristalu e-laser anamandla amakhulu, futhi lithuthukise ngempumelelo ikhono lokucwaninga nokuthuthukiswa okuzimele kwamadivayisi e-laser emikhakheni yolwazi, amandla, imishini ephezulu njalo njalo.
Isikhathi sokuthunyelwe: Meyi-28-2024




