Idizayini yephotoumjikelezo ohlanganisiwe
Amasekethe ahlanganisiwe we-Photonic(I-PIC) ivame ukuklanywa ngosizo lwemibhalo yezibalo ngenxa yokubaluleka kobude bendlela kuma-interrometers noma ezinye izinhlelo ezizwela ekubeni nobude bendlela.Isithombe esithize esakha amanziKwenziwa ngokuthambisa izingqimba eziningi (imvamisa 10 kuya ku-30) ku-wafer, ehlanganiswa bobunjwa abaningi be-polygonal, evame ukumelwa ngefomethi ye-gsii. Ngaphambi kokuthumela ifayela kumenzi we-PhotoMask, kufiseleka ngokuqinile ukukwazi ukulingisa isithombe ukuqinisekisa ukunemba komklamo. Ukulingisa kuhlukaniswe ngamazinga amaningi: Izinga eliphansi kakhulu yi-electromagnetic (em) electromagnetic (em), lapho ukumbumbuluzwa kwenziwa ezingeni eliphansi, yize ukusebenzisana phakathi kwama-athomu ezintweni ezibonakalayo ziphathwa ngendlela ye-macroscopic. Izindlela ezijwayelekile zifaka phakathi i-time-domain enezici ezintathu (3D FDTD) ne-Eigenmode Exprenseon (EME). Lezi zindlela zinembe kunazo zonke, kepha azisebenzi kahle sonke isikhathi se-pic sekulingisa. Izinga elilandelayo lilingisa le-2,5 Lezi zindlela zishesha kakhulu, kepha zidela ukunemba okuthile futhi zikwazi ukuphatha ukusakazwa kobuhlakani futhi azikwazi ukusetshenziselwa ukulingisa abathengisi, ngokwesibonelo. Izinga elilandelayo lingukumbumbulukalo kwe-2d em, njenge-2D FDTD ne-2D BPM. Lokhu kushesha futhi, kepha kube nokusebenza okulinganiselwe, njengokuthi ngeke balingise ama-rolators ama-polarization. Ileveli esengeziwe ukudluliselwa kanye / noma ukusakaza i-matrix sekulingisa. Ingxenye ngayinye enkulu incishwa kwingxenye yokufaka nokukhipha, futhi i-waveguide exhunyiwe yehliswa ekushintsheni kwesigaba kanye nento ye-attenciation. Lokhu kulingisa kushesha kakhulu. Isiginali yokuphuma itholakala ngokuphindaphinda i-matrix yokuhambisa ngesiginali yokufaka. I-matrix ehlakazekile (izakhi zikabani ezibizwa ngokuthi amapharamitha we-S-) ziphindaphinda amasiginali wokufaka kanye nokukhipha ohlangothini olulodwa ukuthola okukodwa nokukhipha amasiginali okufaka ngakolunye uhlangothi lwengxenye. Ngokuyisisekelo, i-matrix yokusakazeka iqukethe okukhanyayo ngaphakathi kwento. I-matrix ehlakazekile imvamisa ikhulu kabili njenge-matrix yokuhambisa kubukhulu ngasinye. Ngamafuphi, kusuka ku-3D em ukuya ekuhanjisweni / ukusakaza i-matrix sekulingisa, isendlalelo ngasinye sokulingisa siveza ukuhweba phakathi kwejubane nokunemba, futhi abaqambi bakhetha izinga elifanele lokulingisa ngezidingo zabo ezithile zokwenza ngcono inqubo yokuqinisekisa ukuklama.
Kodwa-ke, ukuncika ekulinganisweni kwe-elekthronikhi ye-electromagnetic yezinto ezithile nokusebenzisa ukusakazeka / ukudlulisa matrix ukulingisa yonke i-pic akuqinisekisi ukwakheka okulungile ngokuphelele phambi kwepuleti lokugeleza. Isibonelo, ubude bendlela obuhlelekile, ama-wavegcuides ama-multimode ahluleka ukucindezela ngempumelelo izindlela ezi-oda eliphakeme, noma ama-waveguides amabili asondelene kakhulu namunye nezinkinga zokuhlanganisa ezingalindelekile kungenzeka zingabonakali ngesikhathi sekulingisa. Ngakho-ke, yize amathuluzi wokulingisa athuthukile ahlinzeka ngamakhono okuqinisekisa anamandla okuqinisekisa, kusadinga ukuqina okuphezulu nokuhlola ngokucophelela ngumklami, kuhlanganiswe nesipiliyoni esisebenzayo kanye nolwazi lobuchwepheshe, ukunciphisa ukunemba kwephepha lokugeleza.
Icebo elibizwa ngeSparse FDTD livumela ukumbumbuluzwa kwe-3D ne-2D FDTD ukuthi kwenziwe ngqo ekwakhiweni okuphelele kwe-pic ukuqinisekisa ukwakheka. Yize kunzima kunoma yiliphi ithuluzi le-electromagnetic sekulingisa ukulingisa isithombe esikhulu kakhulu, i-sparse FDTD iyakwazi ukulingisa indawo enkulu yendawo. Ku-3D FDTD yendabuko, ukumbumbuluzwa kuqala ngokuqalisa izingxenye eziyisithupha zenkambu ye-electromagnetic kungakapheli ivolumu ethile. Njengoba isikhathi sithuthuka, ingxenye entsha yenkundla yevolumu ibaliwe, njalonjalo. Isinyathelo ngasinye sidinga ukubalwa okuningi, ngakho-ke kuthatha isikhathi eside. Ku-sparse 3D FDTD, esikhundleni sokubala ngesinyathelo ngasinye endaweni ngayinye yevolumu, uhlu lwezakhi zensimu luyagcinwa olungakwazi ukuhambelana nevolumu enkulu ngokungafanele futhi kubalwe kuphela kulezo zinto. Ngesikhathi ngasinye, amaphuzu asondelene nezinto zasensimini angezwa, ngenkathi izakhi zensimu ngaphansi komkhawulo othile wamandla wehliswa. Kwezinhlaka ezithile, lokhu kuhlanganiswa kungaba ama-oda ambalwa ngobukhulu ngokushesha kunendabuko 3D FDTD. Kodwa-ke, ama-FDTD e-sparse awenzi kahle lapho ubhekene nezinhlaka ezihlakazekile ngoba leli nsimu yesikhathi isabalalisa kakhulu, okuholela ekutheni kunzima kakhulu futhi kunzima ukuphatha. Umdwebo 1 ukhombisa isithombe-skrini sesibonelo sokulingiswa kwe-3D FDTD okufana ne-Polarization Beam Splitter (PBS).
Umdwebo 1: Imiphumela yokulingisa kusuka ku-3D sparse FDTD. (A) Ukubuka okuphezulu kwesakhiwo kulungiselelwe, okuyi-coupler eqondayo. (B) Ibonisa isithombe-skrini sokulingisa usebenzisa i-quasi-te ethokozisayo. Imidwebo emibili engenhla ikhombisa ukubuka okuphezulu kwezimpawu ze-quasi-te ne-quasi-tm, futhi imidwebo emibili engezansi ikhombisa ukubuka okuhambisanayo kwesigaba. (C) Ibonisa isithombe-skrini sokulingisa usebenzisa i-quasi-TM excritition.
Isikhathi Sokuposa: Jul-23-2024